Aerotech QNP-Z z-axis nanopositioning stages

Aerotech has introduced a series of Z-axis piezo nanopositioning stages for extreme-precision research and industrial requirements. The QNP-Z stages provide the resolution, linearity, repeatability and high dynamics required for the most demanding applications, from microscopy to optics alignment.

Nanometre-level precision is assured by resolution to 0.15 nm, linearity to 0.007% and bidirectional repeatability to 1 nm. A variety of travels (100 to 600 μm), feedback options and vacuum versions add to the versatility of the stage series.

The stages are guided by precision flexures that are optimised using finite element analysis. The resulting design offers good stiffness and resonant frequency (up to 1050 Hz), enabling high process throughput and fast closed-loop response.

All QNP stages provide good geometric performance (straightness and angular errors) while minimising overall package size. Available adapter plates allow linear, XY and Z-axis stages to be mounted together for simultaneous multi-axis positioning.

Applications include test and inspection, industrial and academic laboratories, military, nanometrology, microscopy, semiconductors, microelectronics, optics, photonics, data storage, precision mechanics, metals, life sciences and medical devices.