igus develops innovative energy chain for cleanrooms

In facilities that manufacture microelectronics, semiconductors or batteries, maximum cleanliness is a necessity. Surroundings must be free from particles while energy and data are conveyed smoothly. This is becoming a real challenge because, as automation increases, the routes for material transport are getting longer.

In modern semiconductor factories, silicon wafers undergo numerous process steps — from lithography to etching to metallisation. Due to strict requirements for cleanliness and freedom from particles, manual transport within the cleanroom is not feasible. Instead, automated systems are being used more and more to transport the wafer cassettes over long distances safely and efficiently.

For example, overhead hoist transport (OHT) is a rail system that moves the cassettes under the ceiling. Although this saves cleanroom space, it presents design engineers with a challenge: supplying the OHT with power and data.

“Busbar systems do not transmit data and require a lot of maintenance. Energy chains usually need a complex extraction device for particles. The demand for a cleanroom-compatible, durable and cost-effective alternative is correspondingly high in the industry,” said Kira Weller, Product Manager for e-chains and Cleanroom Expert at igus.

Devising a system that rolls instead of gliding

To solve this problem, igus developed a special guide system called ‘e-spin’ for its C6 cleanroom energy chain. As with all igus energy chains, its guide wheels are made of tribologically optimised high-performance plastic — that is, plastic that’s optimised for friction and wear. The wheels are located between the upper and lower run of the energy chain. As a result, the chain parts roll on top of each other instead of gliding — avoiding further particle emissions. “Thanks to the e-spin system, the energy chains can be used in production within a cleanroom without the need for an extraction unit. This allows design engineers to reduce the complexity of energy supply in transport systems and save costs in the process,” Weller said.

The system allows for abrasion-resistant travels over distances of up to 30 metres. Laboratory tests in collaboration with the Fraunhofer IPA resulted in the system achieving the highest cleanroom Class ISO 1 at a speed of 0.5 m/s, igus said.

Top image credit: iStock.com/SweetBunFactory. Image used for illustrative purposes only.