Thermo Scientific Centrios circuit edit system

The Thermo Scientific Centrios circuit edit system is designed to help circuit edit (CE) engineers, whether supporting designers or in service labs, to increase their productivity. It is a robust focused ion beam (FIB) circuit edit system that has been engineered to meet the stringent circuit edit requirements of devices at 14 nm and above.

Said to feature sophisticated capabilities, the product offers high-resolution imaging and precision milling over a wide range of beam currents. CE engineers can use the one tool to complete all the circuit edit steps required for rapid prototyping and design validation, quickly resolving functionality issues along the way.

The device is designed with the latest improvements in FIB technology to enable higher beam density with smaller spot sizes and beam profiles, giving CE engineers the high-resolution milling and imaging required for successful edits on today’s prevalent designs. The MultiChem gas delivery system allows engineers to achieve milling precision and control with uniform gas distribution for applications ranging from large area planar delayering to small size high aspect ratio via drilling and filling.

The system is equipped with a simultaneous dual-nozzle gas delivery system and a broad chemistry portfolio for challenging CE applications. Recipes can be created using the company’s customised chemistries to optimise for etch speed with high selectivity, as well as to deposit materials with the highest insulating and conductive qualities required to complete successful edits. It enables rapid prototyping and circuit edit debugging to correct design errors, allowing engineers to quickly deliver first silicon and working samples.