DuPont Kalrez 9600 perfluoroelastomer parts

DowDuPont Transportation and Advanced Polymers has introduced the DuPont Kalrez 9600, an innovative perfluoroelastomer compound developed to meet the needs of the semiconductor fabricating industry.

A well-balanced, high-purity perfluoroelastomer product, the product provides long seal life by offering enhanced performance properties in an array of aggressive and emerging high-temperature plasma applications. It has good ozone, ammonia, fluorine and oxygen radical resistance as well as ultralow outgassing and high thermal stability.

The material is based on a cross-linking system and is identifiable by its olive-green colour. It is especially suitable for plasma deposition applications such as atomic layer deposition and chemical vapour deposition, as well as etch processes used to fabricate next-gen chips in the semiconductor industry.

The product is available in a broad range of standard O-ring sizes and custom parts, including bonded door seals for a variety of sealing applications.