IDT FS1012 and FS2012 MEMS-based flow sensor modules

The FS1012 and FS2012 modules, from Integrated Device Technology (IDT), are high-performance flow rate sensor modules suitable for both liquids and gases. The flow sensors utilise a series of MEMS thermocouples, which provides good signal-to-noise ratio. The solid thermal isolation of the active MEMS sensing element, along with the protective silicon-carbide film coating, offers abrasive wear resistance and long-term operation.

The FS1012 is an uncalibrated standalone flow sensor module with a supply voltage of 3 to 5 V and an analog millivolt output. The FS2012 is a fully calibrated version of the FS1012, featuring a digital I²C output and analog 0 to 5 V output plus temperature compensation circuitry for plug-and-play usage in complex digital systems. The FS2012 module offers accuracy down to 2% of the measurement reading, making it suitable for use in high- or low-flow situations.

With no moving parts, and a solid-state sensor element design that eliminates cavities and diaphragms typically found in similar devices, the modules eliminate clogged sensor elements and fluid pressure sensitivity, provide shock resistance and prevent chemicals from damaging the sensor element. They are suitable for use in medical, industrial and food-grade consumer applications where robustness and protection against cross-contamination are critical factors.