Thermo Scientific Meridian S inverted static optical fault isolation (OFI) system
With the Thermo Scientific Meridian S inverted static optical fault isolation (OFI) system, semiconductor failure analysis labs can futureproof their operations with a fully scalable solution. The all-in-one system includes both photon emission and static laser stimulation applications, and is a high-sensitivity solution for localising electrical failures in semiconductor devices.
Semiconductor failure analysis engineers and technicians can isolate electrical faults that cause semiconductor devices to fail at end-of-line test. These defects, such as metal shorts, opens and transistor-level leakage, are localised in the failure analysis workflow in order to troubleshoot process or design failures, with overall device manufacturing yield expected to increase as a result.
The product also provides semiconductor manufacturers with a static OFI tool that delivers high performance. Multiple upgrade paths are available, bringing the capabilities of dynamic OFI and high sensitivity emission as users’ lab needs develop.
The device includes FDx with Active Probe — a next-generation static laser simulation (SLS) amplifier for applications such as optical beam induced resistance change (OBIRCH) failure analysis. It offers topside probing for flip chip packages and wafer pieces as well as backside probing for conventionally packaged devices.
The product is optimised to work with the Sierra software platform for ease of use and offers features including Live Emission mode, which allows users to see photon emission signatures emerge in real time. It also provides a laser marker option with an accuracy level better than 2 µm.
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